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Semiconductor, Organic EL, LCD panel
| Model | TX210 | |
|---|---|---|
| Structure | Telescopic horizontal articulated type | |
| Degrees of Freedom | 4 axes | |
| Угол поворота | θ axis (rotation JT2) | 432° |
| Z axis (up-down JT3) | 740 mm | |
| X axis (in/out JT4) | 766 mm | |
| W axis (rotation JT6) | 420° | |
| Maximum Reach | 766 mm | |
| Repeatability | ±0.1 mm (wafer center) | |
| Cleanliness*1 | ISO Class 1 | |
| Контроллер | D60/D61 | |