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MODEL | NX510 | NX520 | NX540 | |
---|---|---|---|---|
Structure | Horizontal articulated type | |||
Degrees of Freedom | 4 axes | 5 axes | 4 axes | |
Link | 2 | 2 | 3 | |
Угол поворота | θ axis (rotation JT2) | 330° | 330° | 318° |
440 mm | 440 mm | 440 mm | ||
Z axis (up-down JT3) | 832 mm | 832 mm | 1,232 mm | |
336° | 336° | 336° | ||
X axis (in/out JT4) | - | 336° | - | |
W axis - lower (rotation JT6) | ||||
W axis - upper (rotation JT7) | ||||
Repeatability | ± 0.1 mm (wafer center) | ±0.25 mm | ||
Cleanliness*1 | ISO Class 1 | |||
Контроллер | D60/D61 (see Clean Controllers for specifications) |