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| MODEL | NX510 | NX520 | NX540 | |
|---|---|---|---|---|
| Structure | Horizontal articulated type | |||
| Degrees of Freedom | 4 axes | 5 axes | 4 axes | |
| Link | 2 | 2 | 3 | |
| Угол поворота | θ axis (rotation JT2) | 330° | 330° | 318° |
| 440 mm | 440 mm | 440 mm | ||
| Z axis (up-down JT3) | 832 mm | 832 mm | 1,232 mm | |
| 336° | 336° | 336° | ||
| X axis (in/out JT4) | - | 336° | - | |
| W axis - lower (rotation JT6) | ||||
| W axis - upper (rotation JT7) | ||||
| Repeatability | ± 0.1 mm (wafer center) | ±0.25 mm | ||
| Cleanliness*1 | ISO Class 1 | |||
| Контроллер | D60/D61 (see Clean Controllers for specifications) | |||